Fabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193-nm Optical Lithography

出版年份 2009 全文链接

标题

作者

关键词

出版物

Volume 27, Issue 18, Pages 4076-4083

出版商

Institute of Electrical and Electronics Engineers (IEEE)

发表日期

2009-08-24

DOI

10.1109/jlt.2009.2022282

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