Oxidation of Nano-multilayered TiAlSiN Films at 800–900 °C in Air

Published 2015 View Full Article

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Title
Oxidation of Nano-multilayered TiAlSiN Films at 800–900 °C in Air
Authors
Keywords
TiAlSiN film, Arc ion plating, Oxidation, TiSiN, AlSiN
Journal
OXIDATION OF METALS
Volume 84, Issue 3-4, Pages 345-352
Publisher
Springer Nature
Online
2015-06-28
DOI
10.1007/s11085-015-9558-z
References
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