Nano-laminography for three-dimensional high-resolution imaging of flat specimens

Title
Nano-laminography for three-dimensional high-resolution imaging of flat specimens
Authors
Keywords
-
Journal
Journal of Instrumentation
Volume 8, Issue 05, Pages C05006-C05006
Publisher
IOP Publishing
Online
2013-05-24
DOI
10.1088/1748-0221/8/05/c05006

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