Structural, optical and electrical properties of amorphous carbon films deposited by pulsed unbalanced magnetron sputtering

Published 2015 View Full Article

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Title
Structural, optical and electrical properties of amorphous carbon films deposited by pulsed unbalanced magnetron sputtering
Authors
Keywords
Amorphous carbon films, Substrate temperature, Optical and electrical properties
Journal
OPTIK
Volume 126, Issue 7-8, Pages 861-864
Publisher
Elsevier BV
Online
2015-04-14
DOI
10.1016/j.ijleo.2015.02.047

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