Calibration and optimization of the effective resolution of an optical profiler using the white-noise method and a median filter

Published 2015 View Full Article

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Title
Calibration and optimization of the effective resolution of an optical profiler using the white-noise method and a median filter
Authors
Keywords
Power spectral density, White noise, Fractal surface, Median filter, Effective resolution, Optical profiler
Journal
OPTIK
Volume 126, Issue 24, Pages 4841-4845
Publisher
Elsevier BV
Online
2015-10-11
DOI
10.1016/j.ijleo.2015.09.181

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