XPS study of nitrogen-implanted ZnO thin films obtained by DC-Magnetron reactive plasma

Published 2007 View Full Article

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Title
XPS study of nitrogen-implanted ZnO thin films obtained by DC-Magnetron reactive plasma
Authors
Keywords
-
Journal
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA
Volume 163, Issue 1-3, Pages 15-18
Publisher
Elsevier BV
Online
2007-11-27
DOI
10.1016/j.elspec.2007.11.003

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