XPS study of nitrogen-implanted ZnO thin films obtained by DC-Magnetron reactive plasma

出版年份 2007 全文链接

标题

XPS study of nitrogen-implanted ZnO thin films obtained by DC-Magnetron reactive plasma

作者

关键词

-

出版物

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA

Volume 163, Issue 1-3, Pages 15-18

出版商

Elsevier BV

发表日期

2007-11-27

DOI

10.1016/j.elspec.2007.11.003

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