Study of the thermal decomposition of “captured” intermediates in the CVD of ZnO from DEZ and H2O by TGA–DTA and quadrupole mass spectroscopy

Title
Study of the thermal decomposition of “captured” intermediates in the CVD of ZnO from DEZ and H2O by TGA–DTA and quadrupole mass spectroscopy
Authors
Keywords
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Journal
JOURNAL OF CRYSTAL GROWTH
Volume 311, Issue 9, Pages 2731-2735
Publisher
Elsevier BV
Online
2009-02-27
DOI
10.1016/j.jcrysgro.2009.02.022

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