Study of the thermal decomposition of “captured” intermediates in the CVD of ZnO from DEZ and H2O by TGA–DTA and quadrupole mass spectroscopy

标题
Study of the thermal decomposition of “captured” intermediates in the CVD of ZnO from DEZ and H2O by TGA–DTA and quadrupole mass spectroscopy
作者
关键词
-
出版物
JOURNAL OF CRYSTAL GROWTH
Volume 311, Issue 9, Pages 2731-2735
出版商
Elsevier BV
发表日期
2009-02-27
DOI
10.1016/j.jcrysgro.2009.02.022

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