Controlling of preferential growth mode of ZnO thin films grown by atomic layer deposition

标题
Controlling of preferential growth mode of ZnO thin films grown by atomic layer deposition
作者
关键词
-
出版物
JOURNAL OF CRYSTAL GROWTH
Volume 310, Issue 2, Pages 284-289
出版商
Elsevier BV
发表日期
2007-10-12
DOI
10.1016/j.jcrysgro.2007.10.010

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