High-temperature growth of thick AlN layers on sapphire (0001) substrates by solid source halide vapor-phase epitaxy

Published 2008 View Full Article

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Title
High-temperature growth of thick AlN layers on sapphire (0001) substrates by solid source halide vapor-phase epitaxy
Authors
Keywords
-
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 310, Issue 17, Pages 4016-4019
Publisher
Elsevier BV
Online
2008-06-18
DOI
10.1016/j.jcrysgro.2008.06.033

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