Superhydrophobic silicon surfaces with micro–nano hierarchical structures via deep reactive ion etching and galvanic etching

Published 2011 View Full Article

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Title
Superhydrophobic silicon surfaces with micro–nano hierarchical structures via deep reactive ion etching and galvanic etching
Authors
Keywords
-
Journal
JOURNAL OF COLLOID AND INTERFACE SCIENCE
Volume 364, Issue 1, Pages 219-229
Publisher
Elsevier BV
Online
2011-08-07
DOI
10.1016/j.jcis.2011.07.030

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