Depth profile analysis of nanometric layers by laser-induced breakdown spectroscopy

Published 2013 View Full Article

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Title
Depth profile analysis of nanometric layers by laser-induced breakdown spectroscopy
Authors
Keywords
nanometric layers, depth profiling, thickness measurement, laser-induced breakdown spectroscopy
Journal
Journal of Applied Spectroscopy
Volume 80, Issue 1, Pages 153-157
Publisher
Springer Nature
Online
2013-04-16
DOI
10.1007/s10812-013-9738-z
References
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