Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator

Published 2009 View Full Article

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Title
Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 7, Pages 074003
Publisher
IOP Publishing
Online
2009-07-01
DOI
10.1088/0960-1317/19/7/074003
References
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