Leakage current through the poly-crystalline HfO2: Trap densities at grains and grain boundaries

Title
Leakage current through the poly-crystalline HfO2: Trap densities at grains and grain boundaries
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 114, Issue 13, Pages 134503
Publisher
AIP Publishing
Online
2013-10-03
DOI
10.1063/1.4823854

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