Grain boundary-driven leakage path formation in HfO2 dielectrics

Title
Grain boundary-driven leakage path formation in HfO2 dielectrics
Authors
Keywords
-
Journal
SOLID-STATE ELECTRONICS
Volume 65-66, Issue -, Pages 146-150
Publisher
Elsevier BV
Online
2011-07-23
DOI
10.1016/j.sse.2011.06.031

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