Defects and electronic transport in hydrogenated amorphous SiC films of interest for low dielectric constant back end of the line dielectric systems

Moisture-Insensitive Polycarbosilane Films with Superior Mechanical Properties

(2012) Y. Matsuda et al.   ACS Applied Materials & Interfaces

Identification of a silicon vacancy as an important defect in 4H SiC metal oxide semiconducting field effect transistor using spin dependent recombination

(2012) C. J. Cochrane et al.   APPLIED PHYSICS LETTERS

Film Property Requirements for Hermetic Low-k a-SiOxCyNz:H Dielectric Barriers

(2012) S. W. King et al.   ECS Journal of Solid State Science and Technology

Effects of rapid thermal annealing on structure and electrical properties of Gd-doped HfO2 high k film

(2011) Yuhua Xiong et al.   APPLIED PHYSICS LETTERS

Fourier transform infrared spectroscopy investigation of chemical bonding in low-k a-SiC:H thin films

(2011) S.W. King et al.   JOURNAL OF NON-CRYSTALLINE SOLIDS

Mass and bond density measurements for PECVD a-SiCx:H thin films using Fourier transform-infrared spectroscopy

(2011) S.W. King et al.   JOURNAL OF NON-CRYSTALLINE SOLIDS

Plasma enhanced atomic layer deposition of SiNx:H and SiO2

(2011) Sean W. King   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Limitations of Poole–Frenkel Conduction in Bilayer $\hbox{HfO}_{2}/\hbox{SiO}_{2}$ MOS Devices

(2010) Richard G. Southwick et al.   IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY

Novel Precursor for Development of Si–C2H4–Si Networks in SiCH for Application as a Low-kCap Layer beyond 22 nm Nodes

(2010) Hideharu Shimizu et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Spin dependent tunneling spectroscopy in 1.2 nm dielectrics

(2010) J. T. Ryan et al.   JOURNAL OF APPLIED PHYSICS

Paramagnetic Defect Generation and Microstructure Change in Porous Low-k SiOCH Films with Vacuum Baking

(2010) Kenji Tanbara et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Intrinsic stress effect on fracture toughness of plasma enhanced chemical vapor deposited SiNx:H films

(2010) Sean King et al.   THIN SOLID FILMS

Low Dielectric Constant Materials

(2009) Willi Volksen et al.   CHEMICAL REVIEWS

Direct observation of lifetime killing defects in 4H SiC epitaxial layers through spin dependent recombination in bipolar junction transistors

(2009) C. J. Cochrane et al.   JOURNAL OF APPLIED PHYSICS

Hydrogen desorption kinetics and band bending for 6H–SiC(0001) surfaces

(2009) S.W. King et al.   SURFACE SCIENCE

EPR identification of intrinsic defects in SiC

(2008) J. Isoya et al.   PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS