Effect of tin on point defects and oxygen precipitation in Czochralski silicon: Experimental and theoretical studies

Title
Effect of tin on point defects and oxygen precipitation in Czochralski silicon: Experimental and theoretical studies
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 113, Issue 9, Pages 093511
Publisher
AIP Publishing
Online
2013-03-08
DOI
10.1063/1.4794531

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