Global and local planarization of surface roughness by chemical vapor deposition of organosilicon polymer for barrier applications

Published 2012 View Full Article

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Title
Global and local planarization of surface roughness by chemical vapor deposition of organosilicon polymer for barrier applications
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 111, Issue 7, Pages 073516
Publisher
AIP Publishing
Online
2012-04-10
DOI
10.1063/1.3702428
References
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