Global and local planarization of surface roughness by chemical vapor deposition of organosilicon polymer for barrier applications

标题
Global and local planarization of surface roughness by chemical vapor deposition of organosilicon polymer for barrier applications
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 111, Issue 7, Pages 073516
出版商
AIP Publishing
发表日期
2012-04-10
DOI
10.1063/1.3702428

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