Nanoporosity induced by ion implantation in deposited amorphous Ge thin films

Title
Nanoporosity induced by ion implantation in deposited amorphous Ge thin films
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 111, Issue 11, Pages 113515
Publisher
AIP Publishing
Online
2012-06-07
DOI
10.1063/1.4725427

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