Analysis of doping induced wafer bow during GaN:Si growth on sapphire

Title
Analysis of doping induced wafer bow during GaN:Si growth on sapphire
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 112, Issue 3, Pages 033503
Publisher
AIP Publishing
Online
2012-08-03
DOI
10.1063/1.4739278

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