Characterization of defect evolution in ultrathin SiO2 layers under applied electrical stress

Title
Characterization of defect evolution in ultrathin SiO2 layers under applied electrical stress
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 112, Issue 10, Pages 103513
Publisher
AIP Publishing
Online
2012-11-22
DOI
10.1063/1.4765741

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