Molecular dynamics studies of the bonding properties of amorphous silicon nitride coatings on crystalline silicon

Published 2011 View Full Article

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Title
Molecular dynamics studies of the bonding properties of amorphous silicon nitride coatings on crystalline silicon
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 110, Issue 12, Pages 124905
Publisher
AIP Publishing
Online
2011-12-21
DOI
10.1063/1.3670068
References
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