Molecular dynamics studies of the bonding properties of amorphous silicon nitride coatings on crystalline silicon

标题
Molecular dynamics studies of the bonding properties of amorphous silicon nitride coatings on crystalline silicon
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 110, Issue 12, Pages 124905
出版商
AIP Publishing
发表日期
2011-12-21
DOI
10.1063/1.3670068

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