Effect of (O, As) dual implantation on p-type doping of ZnO films

Title
Effect of (O, As) dual implantation on p-type doping of ZnO films
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 110, Issue 10, Pages 103708
Publisher
AIP Publishing
Online
2011-11-23
DOI
10.1063/1.3662908

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