Effect of (O, As) dual implantation on p-type doping of ZnO films

标题
Effect of (O, As) dual implantation on p-type doping of ZnO films
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 110, Issue 10, Pages 103708
出版商
AIP Publishing
发表日期
2011-11-23
DOI
10.1063/1.3662908

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