Particle-in-cell simulation of ion energy distributions on an electrode by applying tailored bias waveforms in the afterglow of a pulsed plasma

Published 2011 View Full Article

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Title
Particle-in-cell simulation of ion energy distributions on an electrode by applying tailored bias waveforms in the afterglow of a pulsed plasma
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 109, Issue 8, Pages 083302
Publisher
AIP Publishing
Online
2011-04-21
DOI
10.1063/1.3573488
References
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