Particle-in-cell simulation of ion energy distributions on an electrode by applying tailored bias waveforms in the afterglow of a pulsed plasma

出版年份 2011 全文链接

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作者

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出版物

Volume 109, Issue 8, Pages 083302

出版商

AIP Publishing

发表日期

2011-04-21

DOI

10.1063/1.3573488

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