A self-consistent global model of solenoidal-type inductively coupled plasma discharges including the effects of radio-frequency bias power

Published 2011 View Full Article

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Title
A self-consistent global model of solenoidal-type inductively coupled plasma discharges including the effects of radio-frequency bias power
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 109, Issue 7, Pages 073311
Publisher
AIP Publishing
Online
2011-04-12
DOI
10.1063/1.3572264
References
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