Simulation of an Ar/Cl2 inductively coupled plasma: study of the effect of bias, power and pressure and comparison with experiments

Published 2008 View Full Article

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Title
Simulation of an Ar/Cl2 inductively coupled plasma: study of the effect of bias, power and pressure and comparison with experiments
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 41, Issue 6, Pages 065207
Publisher
IOP Publishing
Online
2008-02-27
DOI
10.1088/0022-3727/41/6/065207

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