Study of the relative performance of silicon and germanium nanoparticles embedded gate oxide in metal–oxide–semiconductor memory devices

Published 2011 View Full Article

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Title
Study of the relative performance of silicon and germanium nanoparticles embedded gate oxide in metal–oxide–semiconductor memory devices
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 109, Issue 6, Pages 064504
Publisher
AIP Publishing
Online
2011-03-18
DOI
10.1063/1.3555087
References
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