Study of the relative performance of silicon and germanium nanoparticles embedded gate oxide in metal–oxide–semiconductor memory devices

标题
Study of the relative performance of silicon and germanium nanoparticles embedded gate oxide in metal–oxide–semiconductor memory devices
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 109, Issue 6, Pages 064504
出版商
AIP Publishing
发表日期
2011-03-18
DOI
10.1063/1.3555087

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