In situ method for real time measurement of dielectric film thickness in plasmas

标题
In situ method for real time measurement of dielectric film thickness in plasmas
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 107, Issue 2, Pages 023303
出版商
AIP Publishing
发表日期
2010-01-26
DOI
10.1063/1.3267307

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