Effect of interlayer trapping and detrapping on the determination of interface state densities on high-k dielectric stacks

Published 2010 View Full Article

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Title
Effect of interlayer trapping and detrapping on the determination of interface state densities on high-k dielectric stacks
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 107, Issue 11, Pages 114104
Publisher
AIP Publishing
Online
2010-06-04
DOI
10.1063/1.3391181
References
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