Structural degradation of thin HfO2 film on Ge during the postdeposition annealing

Title
Structural degradation of thin HfO2 film on Ge during the postdeposition annealing
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 107, Issue 10, Pages 103536
Publisher
AIP Publishing
Online
2010-05-29
DOI
10.1063/1.3415542

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