Surface orientation dependence of interface properties of GeO2/Ge metal-oxide-semiconductor structures fabricated by thermal oxidation

Published 2009 View Full Article

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Title
Surface orientation dependence of interface properties of GeO2/Ge metal-oxide-semiconductor structures fabricated by thermal oxidation
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 106, Issue 7, Pages 073716
Publisher
AIP Publishing
Online
2009-10-13
DOI
10.1063/1.3234395
References
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