Thermal evolution and electrical correlation of defect states in Hf-based high-κ dielectrics on n-type Ge (100): Local atomic bonding symmetry

Published 2009 View Full Article

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Journal

JOURNAL OF APPLIED PHYSICS

Volume 106, Issue 7, Pages 074102

Publisher

AIP Publishing

Online

2009-10-06

DOI

10.1063/1.3236679

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