Thermal evolution and electrical correlation of defect states in Hf-based high-κ dielectrics on n-type Ge (100): Local atomic bonding symmetry

标题
Thermal evolution and electrical correlation of defect states in Hf-based high-κ dielectrics on n-type Ge (100): Local atomic bonding symmetry
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 106, Issue 7, Pages 074102
出版商
AIP Publishing
发表日期
2009-10-06
DOI
10.1063/1.3236679

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