Nucleation period, surface roughness, and oscillations in mass gain per cycle during W atomic layer deposition on Al2O3

Published 2009 View Full Article

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Title
Nucleation period, surface roughness, and oscillations in mass gain per cycle during W atomic layer deposition on Al2O3
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 105, Issue 7, Pages 074309
Publisher
AIP Publishing
Online
2009-04-07
DOI
10.1063/1.3103254

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