Nucleation period, surface roughness, and oscillations in mass gain per cycle during W atomic layer deposition on Al2O3

出版年份 2009 全文链接

标题

作者

关键词

出版物

Volume 105, Issue 7, Pages 074309

出版商

AIP Publishing

发表日期

2009-04-07

DOI

10.1063/1.3103254

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