Chemically mediated diffusion of d-metals and B through Si and agglomeration at Si-on-Mo interfaces

Published 2009 View Full Article

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Title
Chemically mediated diffusion of d-metals and B through Si and agglomeration at Si-on-Mo interfaces
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 105, Issue 10, Pages 104305
Publisher
AIP Publishing
Online
2009-05-20
DOI
10.1063/1.3126497
References
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