Chemically mediated diffusion of d-metals and B through Si and agglomeration at Si-on-Mo interfaces

标题
Chemically mediated diffusion of d-metals and B through Si and agglomeration at Si-on-Mo interfaces
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 105, Issue 10, Pages 104305
出版商
AIP Publishing
发表日期
2009-05-20
DOI
10.1063/1.3126497

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