Current conduction mechanisms in Pr2O3/oxynitride laminated gate dielectrics

Title
Current conduction mechanisms in Pr2O3/oxynitride laminated gate dielectrics
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 105, Issue 7, Pages 074103
Publisher
AIP Publishing
Online
2009-04-03
DOI
10.1063/1.3103282

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