Depth resolution function of the laser assisted tomographic atom probe in the investigation of semiconductors

Title
Depth resolution function of the laser assisted tomographic atom probe in the investigation of semiconductors
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 106, Issue 4, Pages 044908
Publisher
AIP Publishing
Online
2009-08-27
DOI
10.1063/1.3186617

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