Effect of N2, Ar, and O2 plasma treatments on surface properties of metals

Published 2008 View Full Article

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Title
Effect of N2, Ar, and O2 plasma treatments on surface properties of metals
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 7, Pages 076101
Publisher
AIP Publishing
Online
2008-04-04
DOI
10.1063/1.2874495

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