Effect of N2, Ar, and O2 plasma treatments on surface properties of metals

标题
Effect of N2, Ar, and O2 plasma treatments on surface properties of metals
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 7, Pages 076101
出版商
AIP Publishing
发表日期
2008-04-04
DOI
10.1063/1.2874495

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