Increase in oxide hole trap density associated with nitrogen incorporation at the SiO2/SiC interface

Title
Increase in oxide hole trap density associated with nitrogen incorporation at the SiO2/SiC interface
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 12, Pages 124513
Publisher
AIP Publishing
Online
2008-06-25
DOI
10.1063/1.2940736

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