Submicron three-dimensional trenched electrodes and capacitors for DRAMs and FRAMs: Fabrication and electrical testing

Published 2008 View Full Article

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Title
Submicron three-dimensional trenched electrodes and capacitors for DRAMs and FRAMs: Fabrication and electrical testing
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 6, Pages 064112
Publisher
AIP Publishing
Online
2008-09-23
DOI
10.1063/1.2981197
References
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