Submicron three-dimensional trenched electrodes and capacitors for DRAMs and FRAMs: Fabrication and electrical testing

出版年份 2008 全文链接

标题

Submicron three-dimensional trenched electrodes and capacitors for DRAMs and FRAMs: Fabrication and electrical testing

作者

关键词

-

出版物

JOURNAL OF APPLIED PHYSICS

Volume 104, Issue 6, Pages 064112

出版商

AIP Publishing

发表日期

2008-09-23

DOI

10.1063/1.2981197

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